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Cost of floor space per sq meter in a semiconductor Fab and near Fab lab space.

WisconsinConstruction Accounting

Nice article, thank you. I am looking for cost per square meter of semiconductor Fab space - ie the cleanroom where the litho/etch etc. processing equipment sit ($50k? to build? How much per year in tax/energy/maint. etc.? after building). Then, there are near fab lab spaces where they have 'near line' metrology like TEM and FIB - what does that lab space cost per sq meter to build and operate (per year)?

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